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EDWARDS SAS

Turbo-molecular pump : STPA1603C ISO200F Inlet EDWARDS SAS

Turbo-molecular pump : STPA1603C ISO200F Inlet

Vacuum pump

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The small and powerful Edwards STPA1603C turbo-molecular pump has been designed using Edwards advanced rotor technology.

This provides high throughput, maximum reliability and class leading performance which is demanded by the latest generation of semiconductor processes.

Its half rack controller and compact design provide considerable space saving, whilst its advanced deposition reduction system gives improved reliability and performance.

The STPA1603C has been qualified on the latest 200 mm etch tools as well as on new generation 300 mm oxide etch processes.

Inlet flange : ISO200F Outlet port : KF40 Purge port : KF10 Water cooling fitting : PT1/4 Ultimate pressure with bake out heating : 10-7 Pa (10-9 Torr) Max allowable backing pressure : 266 Pa Max Nitrogen throughput : 2500 sccm Rated speed : 36500 rpm Starting time : 7 min Water cooling flow : 2 lmin-1

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