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EDWARDS SAS

Turbomolecular pump : STPA803C ISO160F Inlet EDWARDS SAS

Turbomolecular pump : STPA803C ISO160F Inlet

Vacuum pump

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Edwards STPA803C turbomolecular pump is designed for use in semiconductor applications. Edwards advanced rotor technology gives class-leading performance for maximum process flexibility.

The STPA803C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.

Inlet flange : ISO160F Outlet port : KF40 Purge port : KF10 Water cooling fitting : PT1/4 Ultimate pressure with bake out heating : 10-7 Pa (10-9 Torr) Max continuous outlet pressure : 270 Pa (2 Torr) Max Nitrogen throughput : 1500 sccm Rated speed : 32500 rpm Starting time : 7 min Maximum inlet flange temperature : 120 °C
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