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3D Optical Profilometer | AltiSurf©530 ALTIMET

3D Optical Profilometer | AltiSurf©530

Optical profilometer

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The AltiSurf© 530 has been priorly developped for Nanotechnology applications, having auto-alignment of wafer functions.

Same as all the 3D profilometer of the AltiSurf© range, the AltiSurf© 530 station incorporates the latest optical point or line sensor technologies and with its big size (300x300mm) it is very convenient for big parts and samples either in production or R&D.

Features & Advantages

Ability to measure every surfaces (rough, transparent, black, polished…)
Vast choice of measurement range & technology (confocal, interfero, contact)
Optical Measurement: no Damage to the measured part
Max. 300x300x300mm measurement area
Same resolution for each points – high accurate data
Automatic swap between Camera and 2 other sensors
Embedded measurement protocols
Easy to use interface: automation of protocols

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The whole industry Metrology

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