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GREENE TWEED

Elastomer material: Voraz™ GREENE TWEED

Elastomer material: Voraz™

Synthetic caoutchouc

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Greene, Tweed's Voraz™ perfluoro elastomer solutions enhance process chamber efficiency, maximize tool utilization and increase uptime for FPD and solar manufacturers. Voraz provides good plasma resistance to CVD and etch plasmas. Its low stiction facilitates installation and enables faster maintenance reducing downtime of equipment.

Custom Voraz seals are perfect for Gen 5+ slit valve doors and chamber lids. Using Greene, Tweed's patent-pending Extensis® manufacturing process enables the development of large, custom seal designs.

The unique combination of material properties and design flexibility makes Voraz products the perfect choice to reduce your total cost of tool ownership.

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See also

Natural caoutchouc Silicone Thermoplastic elastomer

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