Electrostatic and Vacuum Wafer Chucks

BERLINER GLAS supports the semiconductor industry with innovative chucks for the various processing steps of chip-manufacturing.

Reliable chucking systems – electrostatic chucks or vacuum chucks – encompass significant advantages such as integrated cooling/heating systems and single sided or double sided chucking with structures custom tailored to our customer’s requirements.

With extremely high flatness and very low parallelism deviation, BERLINER GLAS provides the industry with ultra fast chucking solutions for highest yield and the ultimate benefit for high power fab equipment.

With many years of experience in electrostatic and vacuum chucking solutions for semiconductor lithography process, BERLINER GLAS is one of the companies supporting EUV lithography.