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EDWARDS SAS

Turbomolecular pump : STP-XA4503C EDWARDS SAS

Turbomolecular pump : STP-XA4503C

Vacuum pump

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The STP-XA4503C magnetic bearing turbomolecular pump has a wide process window, from high vacuum, to high flow requirements with enhanced throughput for all gases.
 
This pump is based on a new design, offering features to improve thermal management, which enhances performance on harsh processes, increases the maximum process flow capability and reduces the effects of corrosion and deposition. 
 
It has been designed to handle light and harsh duty applications, such as etch, implant, lithography and FPD processes.

Backing port size : KF40 Ultimate pressure : 10-7 Pa / 10-9 Torr Max allowable backing pressure : 266 Pa / 2 Torr Max allowable gas flow N2 (Water cooled only) : 2800 sccm Maximum allowable gas flow Ar (Water cooled only) : 2150 sccm Rated speed : 24000 rpm Run up time to 90% rated speed : 12 minutes Mounting position : Any orientation Recommended purge gas flow N2 : 50 sccm / 8.4 x 10-2 Pam3s-1 Input voltage : 200 – 240 ±10 % V a.c.
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