Ask for a quoteReceive DocumentationContact the supplier
Plasma systems from Diener electronic have long since established themselves in a wide range of industrial sectors. With the Femto low-pressure plasma system, you can rely on modern and future-proof cold plasma technology in a vacuum. The chamber volume of 2 to 3 litres of this plasma system offers enough space to serve laboratory and small series production.
Low pressure plasma treatment is a proven technique for controlled ultra-fine cleaning, adhesion enhancement (activation and etching) and coating of thin films on substrate surfaces. Plasma is generated by applying high-frequency voltage in the vacuum chamber. In the process, the process gas introduced there is ionised.
Fields of application:
VOC-free cleaning of organic residues on silicone, plastic, copper, nickel, ...
Activation before painting, gluing, potting, ...
Etching of PTFE, photoresist, oxide layers, ...
Super-hydrophobic and -hydrophilic coatings
Main features:
Table-top or floor-standing enclosure
Vacuum chambers: Stainless steel, aluminium, borosilicate or quartz glass
Chamber volume: 2 - 3 litres
Gas supply: Needle valves or Mass Flow Controllers (MFCs)
Generator frequencies: 40 kHz / 0 - 100 W; 100 kHz / 0 - 500 W; 13.56 MHz / 0 - 200 W; 2.45 GHz / 0 - 300 W
Controls: Semi-automatic, rotary switch, Basic PC control (Windows CE), Full PC control (Windows 10 IoT)
Pressure measurement: Pirani, capacity manometer
The Femto plasma systems are mainly used in the following areas:
Analytics, archaeology, automotive, research and development departments, semiconductor technology, small batch production, plastics technology, medical technology, microsystems technology, sensor technology, sterilisation, textile technology
Diener electronic offers forward-looking solutions in the areas of:
- Low pressure plasma systems for surface treatment
- Atmospheric pressure plasma systems for surface treatment
- Parylene coating systems
- Aluminium vacuum chambers made of a unique, flexible and patented chamber system
- Complete vacuum systems and plants for a wide range of applications
- Test inks for the determination of surface tension
- Plasma indicators for the detection of a successful plasma treatment
- Plasma generators
Dimensions (Table Top): 310 - 560 mm x 211 - 860 mm x 420 - 600 mm (WxHxD)Dimensions (Stand Alone): 600 mm x 1700 mm x 800 mm (WxHxD)Vacuum Chamber material: Stainless steel, Aluminium, Silica glass (UHP), Borosilicate (HP)Vacuum Chamber dimensions: Ø 95/100 mm, D 280/278 mm, 103-110 mm x 103-120 mm x 285-300 mm(WxHxD)Vacuum Chamber volume: approx. 2 - 3 litresVacuum Chamber closure: Lid, hinged doorGas supply: Needle valves or mass flow controllers (MFCs)Pressure measurement: Pirani, Capacity pressure gaugeGenerator: 40 kHz; 100 kHz; 13,56 MHz; 2,45 GHzElectrodes: According to customer requirements
OTHER PRODUCTS PLASMA DISCHARGE, CORONA DISCHARGE FROM Diener electronic GmbH & Co. KG