Polishing machine : Pcox 200S

Advantages :

• Price.
• Small, easy to use, robust.
• Direct transfer of processes developed on the Pcox200 S to a Pcox20X production machines.
• Possible and easy evolution of a Pcox200 S module into a Pcox20X machine ensuring long tool life without obsolescence.

Utilisation :

The Pcox20X range presents a series of modular machines which offers configurations including 2, 3 or 4 polishing modules.

The Pcox 200 S is one of these modules used in stand-alone form for process development It offers all the specifications of the production machine :

• Complete control by computer and PLC
• Automatic loading and unloading of the polishing head.
• Ten polishing steps.
• Standard 200 mm.
• Compatibility 4" to 8"
• Ex-situ and in-situ conditioning.
• Integrated slurry pumps
• Unique quick exchange of platen, polishing carriers and conditioning tools.


Its structure offers the same productivity specifications as a module included in a Pcox20X machine although with manual loading of the wafer to save space and cost.