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EDWARDS SAS

Turbomolecular Pumps : EXT75DX DN63CF EDWARDS SAS

Turbomolecular Pumps : EXT75DX DN63CF

Vacuum pump

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The EXT75DX is a hybrid bearing compound turbo pump that combines the proven technology of a ceramic mechanical lower bearing, a dry permanent magnetic upper bearing and Holweck drag stage with the added convenience of an on-board 24V controller allowing parallel and serial communication compatible with our TAG and TIC controllers.

It is available with either aDN40NW, ISO63, DN63CF or an ISO100 inlet flange with an N2 pumping speed of up to 66ls-1.

A basic pump system would require an EXT75DX pump, a TAG or TIC controller, either an air or water cooling accessory and a suitable backing pump.

Recommended backing pump : RV5/nXDS6i Vent port : 1/8 inch BSP Purge port : 1/8 inch BSP Water cooling (water at 15 °C, ambient temp at 40 °C) : 2 × 10-2 mbar Forced air cooled, 35 °C ambient : 1 × 10-2 mbar Nominal rotational speed : 90000 rpm Standby rotational speed : Variable from 49500 to 90000 rpm (63000 rpm default) Programmable power limit settings : Variable from 50-120W (80W default) Start time to 90% speed : 110 s ‡ Cooling method# : Forced air / water
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