Capacitive multi-channel system for maximum resolution | capaNCDT 6500

Capacitive displacement sensors are designed for measurement tasks that require extremely high precision. The capaNCDT 6500 capacitive multi-channel system is ideally suited to reliable measurements down to sub-nanometre resolution. The controller offers a maximum response rate of 7.8kHz (digital, with up to four channels) or a frequency response of 8.5kHz. As well as an analogue output, an EtherCAT interface is also available. EtherCAT enables accurate data transmission in real time, with high speed integration into the existing measurement environment and synchronisation of two systems. Set up and configuration of the capaNCDT 6500 system are carried out easily using a web browser.

Maximum resolution

The capaNCDT 6500 system is designed for measurements tasks that require subnanometer resolution. Its strengths are demonstrated particularly well in positioning tasks in the semiconductor industry and laboratory applications. The modular capaNCDT 6500 is designed for multi-channel applications. Up to eight sensors can be connected via a preamplifier to the signal conditioning electronics.

Flexible multi-channel system

The measuring system consists of a controller with integrated display and one demodulator per sensor, which are combined in a rack. The two available controller racks offer space for up to 2 or up to 8 demodulators. A powerful demodulator is available which can, depending on the application, be operated with an integrated or remote preamplifier. Both versions are compatible with all Micro-Epsilon sensor models.

Ease of use via web interface

Due to a user-friendly web interface, the entire configuration process of controller and sensors is carried out without using any additional software. The web interface can be accessed via Ethernet and provides set up and configuration options for filters, arithmetic links and other useful parameters such as triggering, measurement value storage and linearisation.