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EDWARDS SAS

Exhaust Management Systems : M150 EDWARDS SAS

Exhaust Management Systems : M150

Gas disposal

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Edwards offers a range of low-cost, point of use dry abatement systems for semiconductor processing. Each system uses the unique hot bed reactor technology developed for the GRC (Gas Reactor Column) range. 
 
This system handles gas flows up to 60 slpm and destroys hazardous gases to below TLV (Threshold Limit Value) levels.

The M150 requires no water supply and presents no duct corrosion issues associated with back-streaming of moisture.

Reactive process by-products are chemically converted to harmless inorganic salts that are locked into the cartridge allowing for safe disposal.

Power Consumption : Nominal 0.7 to 1.0 kW Mass : 270 kg

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