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Inward Fired Combustors : Atlas Helios EDWARDS SAS

Inward Fired Combustors : Atlas Helios

Gas disposal

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Effective exhaust management of CVD processes must be able to handle the deposition gases and the associated powders.

The fluoride wastes from cleaning gases also require suitable treatment along with global warming gases. Abatement systems must be able to comply with these requirements in one complete unit.

Nominal power requirements : 1.3kW
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