Registration of inclination in the gravitation field using MEMS sensors (Micro-Electro-Mechanical-System) with subsequent digitisation and linearisation via a controller. Data output is carried out via the CANopen interface or as an analogue signal. The inclination sensor has a stable aluminium housing (optionally stainless steel). Slots are available for mechanical alignment (up to approx. ± 7.5°). In the case of CANopen, one connector or one male/female connector combination can be selected optionally for connection purposes. Casting measures in the housing lead to the achievement of protection class IP 69K, e.g. for use under water. MEMS sensors are integrated circuits manufactured using silicon bulk micromechanical technology. These micromechanical structures are used to form dual capacities. If these structures are deflected in the case of acceleration, e.g. gravitational acceleration (g), this results in capacity changes, which are registered and further processed using measuring technology. Due to the differential capacity dependency described here, the output voltage follows the function U ∝ g * sin α. In this case, the angle α is the inclination angle of the sensor measured against the g vector. These sensors measure precisely, have a long service life and are very robust. The measuring axes operate independently of each other.
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