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EDWARDS SAS

Turbo pump : STP-XA2703C VG250 EDWARDS SAS

Turbo pump : STP-XA2703C VG250

Vacuum pump

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The STP-XA2703C turbo pump offers high performance in the process range of high vacuum to 2300 sccm process flow with enhanced throughput for all gases. 

This pump is based on a new platform design offering features to improve thermal management, which enhances performance on harsh processes, increases the maximum process flow capability and reduces the effects of corrosion and deposition. 

The outstanding performance is suited to both light and harsh applications, such as semiconductor etch, implant, lithography and LCD processes.

Rated speed : 27500 rpm Starting time : 8 min Mounting position : Any orientation Water cooling Flow : 3 lmin-1 Water cooling Temperature : 5-25 °C (41-77 °F) Pressure : 0.3 MPa Recommended purge gas flow : 50 sccm (8.4 x 10-2 Pam3s-1) Input voltage : 200 to 240 V a.c. (± 10) Power consumption : 1.5 kVA Pump weight : 75 kg (165 lb)
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