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EDWARDS SAS

Turbomolecular pump : STPA1303C ISO200F Inlet EDWARDS SAS

Turbomolecular pump : STPA1303C ISO200F Inlet

Vacuum pump

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Edwards STPA1303C is a turbomolecular pump designed for use in semiconductor applications. Edwards advanced rotor technology gives class-leading performance for maximum process flexibility.

The STPA1303C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.

Rated speed : 32500 rpm Starting time : 7 min Maximum inlet flange temperature : 120 °C Input voltage : 200 to 240 (± 10) V a.c. Power consumption : 0.85 kVA Pump weight : 39 kg Controller weight : 9 kg
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